Matsusada Precision offers a wide range of high-voltage power supply series for electrostatic chucks. Based on customer feedback, we recognized a considerable need for smooth and reliable chucking and wafer release in the Semiconductor and R&D marketplaces.

2020年4月22日 · An electrostatic chuck (E-Chuck, ESC) is primarily used in semiconductor manufacturing equipment for wafer holding. It can hold wafers even in a vacuum, making it essential for the efficiency and quality maintenance of semiconductor processes. It employs a high-voltage power supply to electrostatic clamping forces.

HECD series is a two-channel, reversible, floating, programmable high voltage power supply for electrostatic chuck drivers. In addition to the polarity switching and forced grounding, the series offers a wafer monitoring system to satisfy wafer detection needs.

MEC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. Compact module type and easy to integrate into a system. Smooth wafer release is possible with polarity change by remote control.

ECA series is a high voltage power supply developed especially for electrostatic chuck applications. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity.

EJC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of the wafer is also possible by reversing the polarity.

2019年8月2日 · Matsusada Precision E-chuck power supplies have functions not only to turn OFF high voltage but also to compulsorily reduce the high voltage on the electrostatic chuck, wafer, or glass substrate when releasing.

ECUB series is an E-chuck HV Power supply with positive and negative, two channel output. The series has an opposite polarity function enabling the wafer to de-chuck smoothly.

Matsusada Precision is the world's leading manufacturer of high-voltage power supplies, Precision DC power supplies, Electronic Loads, High-voltage amplifiers, AC power sources, X-ray inspection systems, and Micro CT.

Matsusada Precision's high-quality and reliable DC power supplies can easily satisfy the requirements of your OEM or laboratory applications. Matsusada Precision classifies power supplies that generate voltages in excess of 1000 V (1 kV) as high-voltage power supplies.