Hexafluorobutadiene is an organofluorine compound with the formula (CF 2 =CF) 2. A colorless gas, it has attracted attention as an etchant in microelectronics. It is the perfluoroanalogue of butadiene. It can be prepared by coupling of fluorinated C 2 precursors.

Use equipment rated for cylinder pressure. Do not open valve until connected to equipment prepared for use. Use a back flow preventative device in the piping. Use only equipment of compatible materials of construction. Always keep container in upright position. Approach suspected leak area with caution.

The molecular formula C4F6 (molar mass: 162.0 g/mol, exact mass: 161.9904 u) may refer to:

Sifren® 46 (C4F6 or Hexafluoro-1,3-butadiene) is an unsaturated fluorocarbon with an alternating double bond. It is a colorless, odorless, toxic, flammable gas showing very high performance for plasma, ion beam, or sputter etching in semiconductor devices manufacturing with Xenon (Xe) and Argon (Ar) as carrier or dilution gas.

2003年6月1日 · Hexafluoro-1,3-butadiene (C 4 F 6) is a relatively new etch gas for the manufacturing of semiconductor devices, especially in critical etch processes that need high aspect ratios and selectivity. It is able to combine very high performance with a benign environmental effect.

hexafluoro-1,3-butadiene (C4F6) is primarily used in Reactive Ion Etching (RIE), Deep Reactive Ion Etching (DRIE) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) on substrates after the photolithographic step in the seminconductor manufacturing process.

Various synthetic routes are known for the formation and industrial scale production of hexafluoro-1,3-butadiene (HFBD), C4F6. This article provides a brief overview and comparison of the key attributes of the most prominent industrial routes.

Hexafluoro-1,3-butadiene is an environmentally friendly dry etching gas with low GWP, high etching rate, high selectivity, and high aspect ratio. Hexafluorobutadiene (C4F6) is a fluorinated hydrocarbon compound that has a number of applications in the semiconductor industry, particularly in the area of etching.

2024年12月18日 · HEXAFLUORO-1,3-BUTADIENE (CAS 685-63-2) information, including chemical properties, structure, melting point, boiling point, density, formula, molecular weight, uses, prices, suppliers, SDS and more, available at Chemicalbook.

Hexafluorobutadine (Hexafluoro-1,3-butadiene) C4F6 is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.