Using angle resolved XPS (ARXPS), it is possible to characterize ultra-thin films without sputtering. In most cases, ARXPS can be considered to be a non-destructive technique. It therefore has the potential to probe sub-surface chemical states that …

Angle resolved XPS (ARXPS) is a specialized technique for the nondestructive analysis of ultra-thin films, revealing thickness, composition, and chemical state.

Angle resolved X-ray photoelectron spectroscopy (ARXPS) is a technique to control the detection depth of a sample by changing the sample tilt angle with reference to the analyzer. Unlike depth profiling with ion sputtering, ARXPS is capable of non destructive analysis of areas deep down to the escape depth of photoelectrons.

Jun 24, 2020 · 定义：Angle resolved XPS , 可以翻译为角分辨 XPS , 是 XPS techniques 中的一种，主要用来分析薄膜材料，可以得到薄膜材料的厚度，材料内部组成分布等信息。 基本原理：由于电子的逃逸深度是有限的，以不同的角度来入射样品，所激发出来的电子来自样品中的不同位置（或者说不同角度发射出来的电子来自不同位置），而通过检测这些信息可以反映薄膜材料不 …

Sep 15, 2023 · Strata PHI analysis of angle-resolved X-ray photoelectron spectroscopic (ARXPS) data is a non-destructive method to reconstruct relative depth information for various chemical species in multi-layered thin films by considering the inelastic mean free path (IMFP) of photoelectrons below the sample surface generated by X-ray beam irradiation.

X-ray photoelectron spectroscopy (XPS) and Ultraviolet photoelectron Spectroscopy (UPS) is used to analyze the surface chemistry of a material. XPS spectra are obtained by illuminating the sample surface with monochromatic X-rays and eventually measuring the photo emitted electrons.

Jan 30, 2023 · Angle-resolved X-ray photoelectron spectroscopy is quantitatively validated. Lab-scale hard X-ray photoelectron spectroscopy is combined with inelastic background analysis. The method allows fast, non-destructive thickness determination. We assess non-destructive methods of XPS for determining thickness in oxide films (sub-nm up to 28 nm).

Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System Collect angle-resolved spectra without the need to tilt the sample to nondestructively characterize ultra-thin layers using the Thermo Scientific™ Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System.

Mar 29, 2006 · Angle‐resolved X‐ray photoelectron spectroscopy (ARXPS) is widely accepted as a useful tool for nondestructive in‐depth analysis of near surface regions.

Angle-resolved XPS (ARXPS) is a technique that varies the emission angle at which the electrons are collected, therefore enabling electron detection from different depths. Unlike sputter depth profiling, ARXPS can provide non-destructive information about the …