An Equipment Front End Module (EFEM) is the mainstay of semiconductor automation, shuffling silicon wafers between ultra-clean storage carriers and a variety of processing, measurement and testing systems.

The EFEM is configurable for different wafer sizes as well as different substrate shapes and formats while using the BOLTS interface. Features. Unibody frame for simple and sturdy foundation; Configurable using Kensington full line of MultiLink Robots, Pre-Aligners and FOUP Load Ports; SEMI Complaint and CE Certified

Our product portfolio includes standard EFEM and wafer stations, as well as custom automation solutions designed to streamline the semiconductor manufacturing process. Our cutting-edge equipment ensures optimal efficiency and accuracy, leading to increased productivity and reduced costs for our customers.

Robots and Design's EFEM is a wafer loading module. The three units included in EFEM are Loading (Loadprt- FOUP Opener), Handler (Wafer Transfer Robot), and Pre-aligner. Integrating a pre-aligner with a clean robot results in a small footprint and allows space to …

2019年6月17日 · Kensington Laboratories offers Performix a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specification, to address the growing constraints faced by the semiconductor industry.

capacities of factory interface (EFEM's or Mini-environment). Yaskawa has the capability to build a fully configured solution by using cutting edge technology of the most suitable automation components that fully meet customer’s specifications for cleanliness, throughput and accuracy. Key Features Interface Panel Service Door Service Door ...

The EFEM (Equipment Front End Module) is a mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation. One to five 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers.

The EFEM (Equipment Front End Module) is a class 1 mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation. The Load Port is modular and can seamlessly integrate to the OEM process tools.

Genmark’s MiniMax™ Equipment Front End Module (EFEM) is a class 1 minienvironment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.

Brooks offerings enhance the efficiencies of manufacturing processes to drive new levels of performance and value. At Brooks, innovative ideas, cutting-edge technologies, and passionate teams are transforming our future. Can your unguarded collaborative robots work safely beside your operators? Ours can.