Hexafluorobutadiene is an organofluorine compound with the formula (CF 2 =CF) 2. A colorless gas, it has attracted attention as an etchant in microelectronics. It is the perfluoroanalogue of …

Hexafluoro-1,3-butadiene | C4F6 | CID 69636 - structure, chemical names, physical and chemical properties, classification, patents, literature, biological activities, safety/hazards/toxicity …

The molecular formula C4F6 (molar mass: 162.0 g/mol, exact mass: 161.9904 u) may refer to:

hexafluoro-1,3-butadiene (C4F6) is primarily used in Reactive Ion Etching (RIE), Deep Reactive Ion Etching (DRIE) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) on substrates …

Sifren® 46 (C4F6 or Hexafluoro-1,3-butadiene) is an unsaturated fluorocarbon with an alternating double bond. It is a colorless, odorless, toxic, flammable gas showing very high performance …

Hexafluorocyclobutene | C4F6 | CID 12767 - structure, chemical names, physical and chemical properties, classification, patents, literature, biological activities, safety/hazards/toxicity …

Hexafluorobutadine (Hexafluoro-1,3-butadiene) C4F6 is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

Jun 1, 2003 · Hexafluoro-1,3-butadiene (C 4 F 6) is a relatively new etch gas for the manufacturing of semiconductor devices, especially in critical etch processes that need high …

Δ vap H (kJ/mol) Temperature (K) Reference Comment; 25.9: 288. Bobbo, Fedele, et al., 2002: Based on data from 273. to 343. K.; AC

All mass spectra in this site (plus many more) are available from the NIST/EPA/NIH Mass Spectral Library. Please see the following for information about the library and its …

ChemSpider record containing structure, synonyms, properties, vendors and database links for Hexafluoro-1,3-butadiene, 685-63-2, LGPPATCNSOSOQH-UHFFFAOYSA-N

Hexafluoro-1,3-butadiene is an environmentally friendly dry etching gas with low GWP, high etching rate, high selectivity, and high aspect ratio. Hexafluorobutadiene (C4F6) is a …

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Structure of Hexafluoro-1,3-butadiene (C4F6) Powered by CC-DPS Delivering 2,100+ Information Sets per Compound.

Jan 11, 2002 · Hexafluoro-1,3-butadiene (Sifren 46, Ausimont; ASHRAE Code R2316) is a fluoro compound with two double bonds in the molecule (C4F6) showing very high performance for …

Notes. Go To: Top Data from NIST Standard Reference Database 69: NIST Chemistry WebBook The National Institute of Standards and Technology (NIST) uses its best efforts to deliver a …

These firms play an integral role in powering various industries, from computing and telecommunications to aviation and healthcare. Primarily, they design, produce, and supply …

Intel is an American multinational corporation and technology company headquartered in Santa Clara, California.Processors are manufactured in semiconductor fabrication plants called …

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