At Axus Technology, we are dedicated to revolutionizing the world of Chemical Mechanical Planarization (CMP) with creating next-generation CMP processing and cleaning tools, including the acclaimed Capstone® CS200 series and Aquarius™ Wafer Cleaner.

FUTURE OF TECHNOLOGY. Our products are designed to meet the needs of the future. We are constantly innovating to provide the best solutions for our customers.

We help clients identify their chemical mechanical polishing (CMP) needs and work with them to custom design and develop a CMP process and advanced wafer solutions that fits their requirements to build new and innovative technology.

Axus Technology 7474 West Chandler Blvd Chandler, AZ 85226. Tel: (480) 705-8000 Fax: (480) 705-8011

At Axus Technology, we are actively developing and cultivating leading-edge surface processing solutions for emerging technology industries such as MEMS, Automotive, Defense and Aerospace, Lifesciences, and IoT.

Axus Technology is a global OEM company that offers modern, flexible CMP processing and cleaning tools such as the Capstone® C200 series and Aquarius™ Wafer Cleaner. We also offer used, refurbished, and remanufactured equipment in addition to tool upgrades, parts, and maintenance services to round out our world-class customer support.

2025年2月5日 · The new Capstone® CS200 series is the next-generation CMP processing tool from Axus Technology offering the best-in-market wafer polishing performance for 100, 150, and 200mm wafer sizes. The state-of-the-art system architecture includes a superior load-polish-unload sequence for high throughput process capability and reduced system footprint.

CHANDLER, Ariz., May 29, 2024 – Axus Technology, a leading global provider of chemical mechanical planarization (CMP) equipment, critical for manufacturing semiconductors and compound semiconductors, today announced it has received $12.5 million in capital funding from growth capital firm IntrinSiC Investment LLC.

2020年2月6日 · Axus Technology, a leading global provider of chemical mechanical planarization (CMP) equipment, critical for manufacturing semiconductors and compound semiconductors, today announced it has received $12.5 million in capital funding from growth capital firm IntrinSiC Investment LLC....

CHANDLER, Ariz., September 24, 2024 – Axus Technology, a leading global provider of chemical mechanical planarization (CMP) equipment, critical for semiconductor and compound semiconductor fabrication, today announced its flagship Capstone Æ CS200 platform tools offer the industry’s lowest cost of ownership (CoO) for CMP processes on 200mm ...