Using angle resolved XPS (ARXPS), it is possible to characterize ultra-thin films without sputtering. In most cases, ARXPS can be considered to be a non-destructive technique. It therefore has the potential to probe sub-surface chemical states that …

Angle resolved XPS (ARXPS) is a specialized technique for the nondestructive analysis of ultra-thin films, revealing thickness, composition, and chemical state.

Angle resolved X-ray photoelectron spectroscopy (ARXPS) is a technique to control the detection depth of a sample by changing the sample tilt angle with reference to the analyzer. Unlike depth profiling with ion sputtering, ARXPS is capable of non destructive analysis of areas deep down to the escape depth of photoelectrons.

2023年9月15日 · Strata PHI analysis of angle-resolved X-ray photoelectron spectroscopic (ARXPS) data is a non-destructive method to reconstruct relative depth information for various chemical species in multi-layered thin films by considering the inelastic mean free path (IMFP) of photoelectrons below the sample surface generated by X-ray beam irradiation.

Since the electron escape path length scales with the angle of emission (while X-ray penetration depth remains constant, Fig. 2), angle resolved XPS (ARXPS) provides a simple, effective and non-destructive system by which to measure film thickness and/or produce relative depth profiles for mapping layer structures. 58–61 A major advantage of ...

Angle resolved X-ray photoelectron spectroscopy determines the thickness and composition of thin coating films by measuring the attenuation of the electrons in the thin coating film as a function of their exit angle. You might find these chapters and articles relevant to this topic.

Not to be confused with Angle-resolved photoemission spectroscopy (ARPES), angle-resolved XPS (ARXPS) is a technique which varies the emission angle at which the electrons are collected and in doing so, enabling electron detection from different depths by exploiting the inelastic mean free path (IMFP) of the photoelectrons.

X-ray photoelectron spectroscopy (XPS) and Ultraviolet photoelectron Spectroscopy (UPS) is used to analyze the surface chemistry of a material. XPS spectra are obtained by illuminating the sample surface with monochromatic X-rays and eventually measuring the photo emitted electrons.

2022年8月28日 · X-Ray photoelectron spectroscopy (XPS), also known as electron spectroscopy for chemical analysis (ESCA), is one of the most widely used surface techniques in materials science and chemistry.

Angle-resolved XPS (ARXPS) is a technique that varies the emission angle at which the electrons are collected, therefore enabling electron detection from different depths. Unlike sputter depth profiling, ARXPS can provide non-destructive information about the …