The Reinforced Thermoset Plastic (RTP) Corrosion-Resistant Equipment Certification Program applies to stationary vessels used for the storage, accumulation, or processing of corrosive or other substances at pressures not exceeding 15 psig external and/or 15 psig internal above any hydrostatic head.

ASME RTP-1–2015 (Revision of ASME RTP-1–2013) Reinforced Thermoset Plastic Corrosion-Resistant Equipment AN AMERICAN NATIONAL STANDARD Two Park Avenue • New York, NY • 10016 USA

This Standard applies to stationary reinforced thermoset plastic corrosion resistant vessels used for the storage, accumulation, or processing of corrosive or other substances at pressures not exceeding 15 psig external and/or 15 psig internal above any hydrostatic head. Table of Contents.

ASM has over 2000+ Person years of experience in serving reputed Semiconductor Equipment Manufacturing Companies. ASM has the expertise and understanding of design and development of System and Sub Systems of PVD, CVD, RTP, Etch, CMP and Inspection tools.

Epitaxy is a high-temperature process, and precise temperature control is extremely important in Epi reactors. ASM has developed new methods of temperature control in our epitaxy tools that enable improved film performance and repeatability in volume production.

Procedures to control the ongoing process of lining fabrication and lining–RTP bond fabrication to ensure that imperfections are within required tolerances prior to final inspection.

ASM has the expertise and understanding of design & development of System and Sub Systems of: PVD, CVD, RTP, Etch, CMP and related Inspection/ process tools for Wafer Metallization and Packaging.

Find the most up-to-date version of ASME RTP 1 at GlobalSpec.

2019年12月31日 · This Standard applies to stationary reinforced thermoset plastic corrosion resistant vessels used for the storage, accumulation, or processing of corrosive or other substances at pressures not exceeding 15 psig external and/or 15 psig internal above any hydrostatic head.

快速热处理 （RTP）设备是一种单片热处理设备，可以将晶圆的温度快速升至工艺所需温度（200-1300℃），并且能够快速降温，升/降温度速率微20-250℃。 除了能源种类多，退火时间范围宽，RTP设备还具有其他优良的工艺性能，如极佳的热预算和更好的表面均匀性，尤其对大尺寸的晶圆片。 修复 离子注入 后的损伤，多个腔体可以同时运行不同的工艺过程。 此外，RTP设备还 …