Hexafluorobutadiene is an organofluorine compound with the formula (CF 2 =CF) 2. A colorless gas, it has attracted attention as an etchant in microelectronics. It is the perfluoroanalogue of butadiene. It can be prepared by coupling of fluorinated C 2 precursors.

Use equipment rated for cylinder pressure. Do not open valve until connected to equipment prepared for use. Use a back flow preventative device in the piping. Use only equipment of compatible materials of construction. Always keep container in upright position. Approach suspected leak area with caution.

Hexafluoro-1,3-butadiene | C4F6 | CID 69636 - structure, chemical names, physical and chemical properties, classification, patents, literature, biological activities, safety/hazards/toxicity information, supplier lists, and more.

The molecular formula C4F6 (molar mass: 162.0 g/mol, exact mass: 161.9904 u) may refer to:

2021年10月14日 · Hexafluorocyclobutene | C4F6 | CID 12767 - structure, chemical names, physical and chemical properties, classification, patents, literature, biological activities, safety/hazards/toxicity information, supplier lists, and more.

hexafluoro-1,3-butadiene (C4F6) is primarily used in Reactive Ion Etching (RIE), Deep Reactive Ion Etching (DRIE) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) on substrates after the photolithographic step in the seminconductor manufacturing process.

2003年6月1日 · Hexafluoro-1,3-butadiene (C 4 F 6) is a relatively new etch gas for the manufacturing of semiconductor devices, especially in critical etch processes that need high aspect ratios and selectivity. It is able to combine very high performance with a benign environmental effect.

Sifren® 46 (C4F6 or Hexafluoro-1,3-butadiene) is an unsaturated fluorocarbon with an alternating double bond. It is a colorless, odorless, toxic, flammable gas showing very high performance for plasma, ion beam, or sputter etching in semiconductor devices manufacturing with Xenon (Xe) and Argon (Ar) as carrier or dilution gas.

Hexafluorobutadine (Hexafluoro-1,3-butadiene) C4F6 is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

Δ vap H (kJ/mol) Temperature (K) Reference Comment; 25.9: 288. Bobbo, Fedele, et al., 2002: Based on data from 273. to 343. K.; AC