Atomic Layer Deposition of Al-Doped ZrO - IOPscience
2011年12月30日 · We have investigated the atomic layer deposition (ALD) on SiO 2 and III-V (i.e., In 0.53 Ga 0.47 As) substrates of Al-doped ZrO 2 (Al-ZrO 2) films. The aim is to benefit …
Atom probe tomography of deuterium-charged optimised ZIRLO
2024年11月6日 · This study investigates the morphology and composition of hydrides in Optimized ZIRLO following electrochemical deuterium charging. Both ZrO and ZrD x phases …
(a) ALD super-cycle structure used for the deposition of Al-ZrO 2 ...
Al-doped ZrO2 (Al-ZrO2) films deposited by atomic layer deposition onto silicon substrates and the interface with the TaN metal gate are investigated. In particular, structural properties of...
The Al-Zr (aluminum-zirconium) system | Journal of Phase …
1992年6月1日 · Journal of Phase Equilibria - G. Brauer,“Crystal Structure of Intermetallic Alloys of Aluminium with Titanium, Zirconium, Thorium, Niobium and Tantalum,”Naturwissenschaften, …
Synthesis and characterization of a novel hybrid material as …
2014年7月15日 · A new hybrid chelating ion exchanger zirconium diethylene triamine (ZrD) has been synthesized by a simple sol–gel route using inexpensive and easily available chemicals. …
ALD HfO2- and ZrO2-based ferroelectrics enable novel‚ CMOS-compatible devices for both logic and memory1. Although the most stable bulk crystal structure of these materials is a …
Observations of temperature stability of γ-zirconium hydride by …
2016年3月15日 · The results showed that the peritectoid reaction α-Zr + δ-ZrD → γ-ZrD previously suggested to occur at high temperatures does not take place in the system. Slow …
HfD-04 and ZrD-04 show linear ALD growth with both and ozone. There is strong monoclinic suppression in ZrO2 films with ozone at 300°C (extending results from A. Lamperti‚ Lamagna‚ …
Textured targets of deuterides TiD2, ZrD2, NbD, and CrD2 in
2016年1月6日 · Various methods for depositing thin layers of deuterides (hydrides) TiD 2 (TiH 2), ZrD 2 (ZrH 2), NbD (NbH), and CrD 2 (CrH 2) on stainless steel, copper, and silicon substrates …
国产之光！ZRD 快想无纸化软件获麒麟、统信认证，这波操作直接 …
ZRD 快想无纸化客户端软件就完美解决了这个烦恼，几乎所有常见文档格式，像 PDF、Word、Excel、PPT 等它都支持，根本不用操心格式转换。 而且软件内置的编辑工具超强大，常规的 …
- 某些结果已被删除