The Korea Research Institute of Standards and Science (KRISS) has successfully developed a system that diagnoses the lifetime ...

Lam Research Corp. has rolled out what it claims is an advanced plasma conductor etch tool needed for 3D chipmaking. Called ...

Akara extends decades of Lam leadership in conductor etch. This includes multiple generations of the company's highly ...

To store ever more data in electronic devices ... ion etching, isn't fully understood and could be improved. One recent development involves keeping the wafer––the sheet of semiconductor ...

Lam Research Corp. (Nasdaq: LRCX) today introduced Akara®, a breakthrough innovation in plasma etch and the most advanced ...

Ceramics account for over 90% of the materials used in the internal components of semiconductor etching equipment. One of the main reasons is their superior plasma resistance compared to other ...

U.S. chip equipment maker Lam Research Corp (NASDAQ:LRCX) launched two new tools for building advanced artificial ...

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The chemical etching process he used is a bit fussy, and prone to undercutting of the mask if the etchant seeps underneath it. As its name implies, RIE uses a plasma of highly reactive ions to do ...

Researchers from the University at Buffalo, Central South University, Shandong Normal University, Sungkyunkwan University, TU ...