The advanced Plasma Enhanced CVD system is ideal for the passivation of dielectric films (for example, SixNy, SiO 2), amorphous silicon, silicon carbide, hard mask deposition, and anti-reflective ...
Chemical Vapor ... and the overall deposition process. 2. Activation of reactants: The precursors require activation to initiate the chemical reaction, which can be achieved through various methods.
and German PV equipment manufacturer Centrotherm has developed a POLO back junction solar cell by using an industrial plasma enhanced chemical vapor deposition (PECVD) system with a low-frequency ...