Resonant Cantilever by [Pcflet01], CC BY-SA 3.0 MEMS have a wide range of applications including ink jet printers, accelerometers ... a cantilever is a rigid structure, often a beam or a plate ...

A MEMS accelerometer is much simpler The MEMS accelerometer has a more static structure, and is essentially a sprung element which deflects in one axis to due to acceleration. This mechanical ...

Bulk micromachining involves etching a structure into the silicon wafer substrate. Surface micromachining involves depositing and etching layers one on top of another. MEMS production equipment is ...