This was the first time that the i-line stepper, a common piece of equipment used in semiconductor manufacturing, was used exclusively. A new generation of small optical devices could be made ...

fabricated and tested flat lenses called Fresnel zone plates (FZPs), but did so for the first time using only common semiconductor manufacturing equipment, the i-line stepper. The work has been ...

Researchers have fabricated and tested flat lenses called Fresnel zone plates (FZPs), but did so for the first time using only common semiconductor manufacturing equipment, the i-line stepper ...