Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

a limit to frequency conversion using nonlinear optics, because deep-ultraviolet absorption in the crystals prevents the generation of wavelengths below ∼200 nm. In the extreme ultraviolet (EUV ...

The primary source of ultraviolet light is the sun, and most of the UV light that reaches earth is in the lower-frequency UVA region ... ultraviolet < 200 EUV Extreme ultraviolet 10-121 THIS ...

To utilize UV frequency combs containing a million closely spaced spectral lines for spectroscopy applications, the researchers needed a method capable of achieving high spectral resolution ...