The list of electronic special equipment includes deep ultraviolet (DUV) lithography equipment called "argon fluoride lithography machine," with core technical specifications of "300mm wafer ...
Interestingly, DUV lithography at a wavelength of 193 nm has dominated the field much longer than originally expected, with a continual series of improvements prolonging its lifespan. The ...
The most advanced sub-5nm silicon nodes require the latest EUV (extreme ultraviolet) lithography tools like the one above, but Chinese chipmakers are stuck with DUV (deep ultraviolet) lithography.
The details remain unclear, but ASML did not deliver the machine to the Chinese foundry due to US sanctions. However, ASML kept shipping advanced DUV lithography tools, such as the Twinscan NXT ...
ASML's EUV machines are more complex than previous deep ultraviolet, or DUV, ones, which means a higher potential for service revenue during their lifetime. Ninety percent of ASML’s lithography ...