This combination will allow easy entry to newcomers in ALD/ALEt. ASM Microchemistry F-120 ALD Center Finland houses in total eight ASM Microchemistry F-120 reactors. These reactors are especially well ...
1 Hot wall viscous flow reactors for routine growth and etching without in situ probing techniques. One of these reactors can accommodate 6” wafers. 1 Plasma ALD reactor equipped with an in situ ...
In the last 10 years, Forge Nano has been developing and constructing a range of most reliable and sophisticated particle ALD reactor systems in the world. The company routinely uses such high quality ...
Cambridge NanoTech has combined its leading ALD expertise with advanced Computational Fluid Dynamics analyses to optimize Fiji F200 ALD reactor, heater and trap geometry. The hyperboloid reactor ...
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